The P-Series represents a productline of
peltier-based thermal chuck systems for a temperature range between
-65°C up to +150°C.
Key facts:
· High performant, exceptional temperature uniformity
· High isolation for low
leakage (femto-amp level), low capacitance test measurements
· Fully integrated for 200 and 300 mm prober systems, 6 inch on request
· Available for all major
wafer probing stations, laser trimmers
and inspection stations
· Standard or PC- based
control unit
· Different high performant chillers for various temperature requirements
· Modular combination with nearly all P-Series products
· Handling system on request
Datasheet P200 Datasheet P300
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