 |
|
|
| Temperature Range |
-65°C to +150°C |
|
| Extended Temperature Range |
-75°C to +200°C |
|
| Temperature Stability |
±0,1°C |
|
| Temperature Accuracy |
±0,5°C |
|
| Heating Rates |
+25°C to +150°C |
<15min |
| |
-65°C to +25°C |
<8min |
| Cooling Rates |
+25°C to -65°C |
<15min |
| |
+150°C to +25°C |
<5min |
| Chuck Diameter |
205mm |
|
| Temperature Uniformity |
-65°C to +150°C |
< ± 0,8K |
| Flatness / Paralellism |
< ± 10µm |
|
| Isolation |
>1,0TOHM |
at 25°C |
| Capacitance |
600pF |
Standard |
| Interface |
RS 232 |
Standard |
| |
IEEE 488 |
optional |
| Chuck Dimensions |
Diameter |
210mm |
| |
Height |
32mm |
| |
Weight |
3250g |
| Dimensions Controller |
19" Rack 4HU or customer specified |
|
Deviations in the technical data can occur
|
