Temperature Range -65°C to +150°C  
Extended Temperature Range -75°C to +200°C  
Temperature Stability ±0,1°C  
Temperature Accuracy ±0,5°C  
Heating Rates +25°C to +150°C <15min
  -65°C to +25°C <8min
Cooling Rates +25°C to -65°C <15min
  +150°C to +25°C <5min
Chuck Diameter 205mm  
Temperature Uniformity -65°C to +150°C < ± 0,8K
Flatness / Paralellism < ± 10µm  
Isolation >1,0TOHM at 25°C
Capacitance 600pF Standard
Interface RS 232 Standard
  IEEE 488 optional
Chuck Dimensions Diameter 210mm
  Height 32mm
  Weight 3250g
Dimensions Controller 19" Rack 4HU or customer specified
Deviations in the technical data can occur
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