chuckATT Systems

Discover the fascinating world of the ultimate chuck systems

We offer a wide range of extremly performant, reliable temperature control systems for the semiconductor industry. High End Systems like the P200/300 for temperatures down to -75°C, as well as the A200/300, a low noise, low energy active cooled chuck systems in the segment of hotchucks with exceptional cooldown rates at a valuable price. The modular construction for convenient, cost-effective system upgrades, highest safety of investment and easy customization. Advanced Temperature Test Systems means best available components for our products and the most advanced manufacturing technology. Our products are designed for exceptional thermal and mechanical stability and precision. Both productseries the P200/300 and the A200/300 are constructed for all major probersystems, like TSK, Electroglas, TEL, Cascade, Süss, Wentworth etc.. In addition to our standard productseries, we develop solutions for the 6 inch wafertest and specific systems for testing of electronic components, hybrids, PCBs or other assemblies at the tester site, wafer prober or at your unique applications.

P-Series Performance for Watertesting at lowest temperatures

The P-Series represents a productline of peltier-based thermal chuck systems for a temperature range between -75°C up to +200°C. Key facts: High performant, exceptional temperature uniformity High isolation for low leakage (femtoamp level), low capacitance test measurements Fully integrated for 200 and 300 mm prober systems, 6 inch on request Available for all most major wafer probing stations, laser trimmers and inspection stations19 inch or PC- based control unit · Different high performant chillers for various temperature requirements Modular combination with nearly all P-Series products Handling system on request

A-Series Challenging the limits of technical innovation

The A-Series represents a productline of aircooled thermal chuck systems for a temperature range between -30°C up to 400°C. The basic product offers an active cooled chuck system without an external chiller for a temperature range between +25°C up to +200°C at a very competitive price to a common hotchuck. Optional low noise external chillers for temperatures down to -30°C or high temperature systems up to 400°C. Key facts: · Low noise, high performant, exceptional temperature uniformity · High isolation for low leakage (femtoamp level), low capacitance test measurements · Tri-axial configuration is standard for all chuck systems of the A-Series · No liquid coolants are required · Fully integrated for 200 and 300 mm prober systems, 6 inch on request · Available for all most major wafer probing stations, laser trimmers and inspection stations · 19 inch or PC- based control unit · Different high performant chillers for various temperature requirements · Supplementary upgrade with an external chiller · Modular System Design for convenient, cost-effective system upgrades as wafer diameter and temperature requirements change

Solution Special solutions for your individual requirements

ATT Systems offers a wide range of special purpose applications especially for low temperature test of hybrids, PCBs or other assemblies. We focus on combinations of precise controlled temperature, mechanical handling systems with a controlled environment that allows an moisture free handling and testing.