 |
|
|
| Temperature Range |
+40°C to +200°C |
|
| Extended Temperature Range |
-60°C to +300°C |
|
| Temperature Stability |
±0,1°C |
|
| Temperature Accuracy |
±0,5°C |
|
| Heating Rates |
+25°C to +200°C |
<20min |
| |
-60°C to +25°C |
<8min |
| Cooling Rates |
+25°C to -60°C |
<25min |
| |
+200°C to +25°C |
<15min |
| Chuck Diameter |
305mm |
|
| Temperature Uniformity |
-60°C to +200°C |
< ± 0,5K |
| |
|
< ± 0,5% |
| Flatness / Paralellism |
< ± 10µm |
|
| Isolation |
>5,0TOHM |
at 25°C |
| Capacitance |
1000pF |
Standard |
| |
100µF |
triaxial connected |
| Interface |
RS232 |
Standard |
| |
IEEE488 |
optional |
| Chuck Dimensions |
Diameter |
305mm |
| |
Height |
40mm |
| |
Weight |
8850g |
| Dimensions Controller |
19" Rack 4HU or customer specified |
|
Deviations in the technical data can occur
|
