The A-Series represents a productline of
air cooled thermal chuck systems for a temperature range between -30°C
up to +400°C. The basic product offers an active cooled chuck system
without an external chiller for a temperature range between +25°C
up to +200°C at a very competitive price to common Hot Chucks.
Optional external chillers for temperatures down to -30°C or high
temperature systems up to +400°C.
Key facts:
· Low noise, high performant,
exceptional temperature uniformity
· High isolation for low
leakage (femto-amp level), low capacitance test measurements
· Tri-axial configuration
is standard for all chuck systems of the A-Series
· No liquid coolants are
required
· Fully integrated for 200
and 300 mm prober systems, 4 and 6 inch on request
· Available for all major
wafer probing stations, laser trimmers
and inspection stations
· 19 inch control unit
· Supplementary upgrade
with different high performant chillers for various
temperature requirements
· Modular system design
for convenient, cost-effective system upgrades
as wafer diameter and temperature requirements change
· Optional high voltage
model (max. 8KV)
Datasheet A200 Datasheet
A300 |
