 |
|
|
| Temperature Range |
+25°C to +200°C |
|
| Extended Temperature Range |
-20°C to +300°C |
|
| Temperature Stability |
±0,1°C |
|
| Temperature Accuracy |
±0,5°C |
|
| Heating Rates |
+25°C to +200°C |
<10min |
| |
-10°C to +25°C |
<3min |
| Cooling Rates |
+25°C to -10°C |
<10min |
| |
+200°C to +25°C |
<10min |
| Chuck Diameter |
305mm |
|
| Temperature Uniformity |
-20°C to +100°C |
< ± 0,5K |
| |
+100°C to 200°C |
< ± 0,5% |
| Flatness / Paralellism |
< ± 8µm |
|
| Isolation |
>2TOHM |
|
| Capacitance |
1000pF |
Standard |
| |
100pF |
triaxial connected |
| Interface |
RS232 |
Standard |
| |
IEEE488 |
optional |
| Chuck Dimensions |
Diameter |
305mm |
| |
Height |
40mm |
| |
Weight |
6550g |
| Dimensions Controller |
250mm x 480mm x 120mm or individual |
|
Deviations in the technical data can occur
|
