Temperature Range +25°C to +200°C  
Extended Temperature Range -30°C to +400°C  
Temperature Stability ±0,1°C  
Temperature Accuracy ±0,5°C  
Heating Rates +25°C to +200°C <10min
  -10°C to +25°C <4min
Cooling Rates +25°C to -10°C <15min
  +200°C to +25°C <15min
Chuck Diameter 205mm  
Temperature Uniformity -30°C to +100°C < ± 0,5K
  +100°C to +400°C < ± 0,5%
Flatness / Paralellism < ± 10µm  
Isolation >5TOHM at 25°C
Capacitance 800pF Standard
  50pF triaxial connected
Interface RS232 Standard
  IEEE488 optional
Chuck Dimensions Diameter 205mm
  Height 28mm
  Weight 2750g
Dimensions Controller 19" Rack 4HU or customer specified
Deviations in the technical data can occur
contact us by email or phone +49-89-89.94.82 0
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